Spin Coaters

Brewer Science® Cee® precision spin coaters feature high spin speed resolution, broad chemical compatibility, and exceptional reliability.


Spin coating a silicon wafer

Industry-leading precision

With spin speed resolutions and repeatability within 0.2 rpm, Brewer Science® Cee® spin coaters provide all the necessary precision for critical processes.

Broad chemical compatibility

Choose between Teflon®, stainless steel, or polyethylene spin bowl construction for maximum material compatibility.

Exceptional uptime and reliability

All Brewer Science® Cee® spin coaters feature an indirect drive system, which protects the spin motor from contact with process chemicals and solvents. Isolating the spin motor from the process environment greatly increases tool reliability and uptime.

Product Options

With numerous configuration options and a huge variety of substrate-specific spin chucks to choose from, Brewer Science® Cee® spin coaters can handle almost any application imaginable. Compare product specifications below to see which configuration is right for you, or contact us to request more information.

 

Cee® 200X
Spin Coater

Cee® 300X
Spin Coater

  Cee® 200X spin coater Cee® 300X spin coater
Substrate Sizes

Up to 200 mm round or 7″ × 7″ square

Up to 450 mm round or 14″ × 14″ square

 

Precision

Maximum Spin Speed

12,000 rpm

Configurable to 16,000 rpm

6,000 rpm

4,000 rpm and 3,000 rpm configurations available for additional acceleration capabilities

Spin Speed Resolution

Within 0.2 rpm

Within 0.2 rpm

Spin Speed Repeatability

Within 0.2 rpm

Within 0.2 rpm

Spin Speed Acceleration

Up to 23,000 rpm/s with
200-mm substrate

Up to 3,000 rpm/s with 6″ × 6″ × 0.250″ photomask recessed chuck

Up to 30,000 rpm/s unloaded

Up to 23,000 rpm/s with 300-mm substrate

Up to 3,000 rpm/s with 350 mm × 6 mm round recessed chuck

Up to 400 rpm/s with 14″ × 14″ × 11 mm photomask recessed chuck

Up to 30,000 rpm/s unloaded

 

Control

Control Interface

Onboard Windows®-based PC with 7″ touch screen display

Connectivity

USB and ethernet ports for uploading/‌downloading process parameters

Third-Party Integration

System capable of controlling third-party host software for high-end IDI/‌Cybor/‌Mykrolis positive displacement pumps

Automated Dispense Control

Simultaneously trigger up to 16 automated dispense nozzles

Simultaneously trigger up to 16 automated dispense nozzles

Dispense or Component Outputs

50

50

Spin Control

Bidirectional speed control (oscillating chuck)

In-process dynamic speed/‌acceleration control

 

Programmability

Onboard Storage

Up to 250,000 process recipe programs with a virtually unlimited number of program steps per recipe

Step Time

0.1 to 9,999.9 seconds with a resolution of 0.1 second

Security

Password protection available at no charge

 

Design

Spin Bowl Design

Teflon® spin bowl for optimal material compatibility

Integrated bowl ring to eliminate material migration

Drain and exhaust ports located in bottom of bowl

Optional bowl materials: stainless steel (for all–stainless steel construction); polyethylene (educational package)

Disposable polyethylene liners available

Optional Teflon® or polyethylene splash ring available

Stainless steel spin bowl

Drain and exhaust ports located in bottom of bowl

Optional bowl materials: ETFE-coated stainless steel; Teflon® or polyethylene bowl liner (non-disposable)

Optional Teflon® or polyethylene splash ring available

Lid Design

Closed- and open-lid designs available

Spin Environment

Optional nitrogen purge available for an inert spin environment

Reliability Features

Indirect drive system protects spin motor from contact with process chemicals and solvents

Vacuum and lid interlock with mechanical lock to prevent accidental process disruption

Dimensions

13.25″ W × 19″ D × 12″ H
(33.65 cm W × 48.26 cm D × 30.48 cm H)

Machine weight: 40 lb (18.14 kg)

Shipping weight: 100 lb (45.36 kg)

27.75″ W × 34.75″ D × 20.25″ H (70.5 cm W × 88.3 cm D × 51.5 cm H)

Machine weight: 115 lb (52.2 kg)

Shipping weight: 250 lb (113.4 kg)

 

Utilities

Voltage Ranges

100–125, 208–240 VAC 50/60 Hz

208–240 VAC 50/60 Hz

Power Requirements

655 watts
6.0 amps

1350 watts
7.0 amps

Drain Port

0.75″ OD

1″ OD

Exhaust Port

1″ OD

1.5″ OD

Vacuum

20–25 in Hg

20–25 in Hg

Exhaust

20–50 cfm at 0.2″ water column

20–50 cfm at 0.2″ water column

Nitrogen or CDA (automated dispense)

70 psi

70 psi

 

Support

Warranty

1-year full warranty on parts and labor

Technical Support

Free remote technical support (phone, email) for the life of the product

Applications Support

Free applications and process assistance for the life of the product