Cee® Model 11 Bake Plate

The Cee® Model 11 bake plate provides the user with the utmost in thermal accuracy and uniformity.

Data Sheet Contact Us

The Brewer Science Cee<sup>®</sup>  Model 11 bake plate is specifically designed for large-area 450-mm-diameter substrates and 20-in-square (maximum) FPD/LCD panels. It provides process and R&D engineers with the utmost in thermal accuracy and uniformity. The footprint is extremely compact, so it installs seamlessly within existing clean room hoods or on laboratory table surfaces.

Operation

  • Pneumatic lift pins (load/unload) standard
  • Removable fixed proximity standoffs (0.006” standard)
  • Contact or fixed proximity bake methods (standard)
  • Optional vacuum and proximity bake for 300- and 450-mm wafers
  • Optional custom bake plate surfaces available upon request

Programmability

  • Dual 4-digit alphanumeric LED display
  • Full PID operation
  • Temperature auto-tuning capable
  • Security: password protection option at no charge
  • Optional ramping capability (8 specific set points)

Precision

  • Substrate Sizes: < 1cm to 450-mm round; 20” x 20” square
  • Temperature Resolution: 0.1°C
  • Temperature Range: ambient to 200°C (250°C optional)
  • Temperature Uniformity: ± 0.3% across working surface

Reliability

  • Industry-leading reliability and uptime
  • 1-year full warranty on parts and labor
  • Free remote technical support (phone, email, fax) for the life of the product
  • Application process assistance for life of the product