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Thermal- and chemical-resistant acid protection coating material and spin-on thermoplastic adhesive
Click Here to Read MoreHighly etch-resistant polymer block for use in block copolymers for directed self-assembly
Click Here to Read MoreWet developable hard mask in conjunction with thin photoresist for microphotolithography
Click Here to Read MoreSpin-on protective coatings for wet-etch processing of microelectronic substrate
Click Here to Read MoreOn-track process for patterning hardmask by multiple dark field exposures
Click Here to Read MoreThermosetting polyester anti-reflective coatings for multilayer photoresist processes
Click Here to Read MoreThermosetting polyester anti-reflective coatings for multilayer photoresist processes
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