Newsroom

9,157,003

9,123,541

Highly etch-resistant polymer block for use in block copolymers for directed self-assembly

8,808,969

Method of making radiation-sensitive sol-gel materials

8,647,809

Metal-oxide films from small molecules for lithographic applications

5,935,760

Thermosetting polyester anti-reflective coatings for multilayer photoresist processes