Brewer Science

Newsroom

Show Me All News Blog Ebooks Videos Press Releases Events

Related Articles

Planarization: Leveling extreme topography for microelectronics

Fabrication of microelectronic devices increasingly involves the creation of high-aspect-ratio structures (those with large height or depth and narrow width, such as trenches, vias, columns, and mesas).  These structures provide isolation; serve as conduits for electrical, optical, or fluid signals; or enable pre-dicing before die singulation. New designs in semiconductor and MEMS devices are pushing…

  Lithography, planarization, MEMS Click Here to Read More
Top