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Scratch-resistant coatings for protecting front-side circuitry during backside processing
Click Here to Read MoreOn-track process for patterning hardmask by multiple dark field exposures
Click Here to Read MoreThermal- and chemical-resistant acid protection coating material and spin-on thermoplastic adhesive
Click Here to Read MoreHighly etch-resistant polymer block for use in block copolymers for directed self-assembly
Click Here to Read MorePhotolithographic article utilizing polymers with light-absorbing properties for anti-reflective coating
Click Here to Read MoreThermosetting polyester anti-reflective coatings for multilayer photoresist processes
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