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Thermal slide debonding for temporary bonding processes (Part 3 of 3)

Thermal slide debonding represents the next significant advancement in obtaining high-yield thin wafer results. Initial detection of anomalies and cracks usually occurs during debonding; however, many causes for this damage originate during upstream bonding material coating, curing, bonding, and thinning processes. Moreover, only thermal separation tools that are highly precise and highly accurate will consistently…

  Wafer-Level packaging, debonder, thin wafer handling, spincoat, 3D packaging Click Here to Read More